Method of Estimating RF Probe-Tip Calibration Reproducibility Budget on Commercial Calibration Substrates
A. Rumiantsev1, R. Doerner2
Published in:
104th ARFTG Microwave Measurement Conference (ARFTG 2025), San Juan, USA, Jan. 19-22, ISBN 979-8-3503-6838-3 (2025).
Abstract:
The paper presents a method for estimating the reproducibility budget for RF probe-tip calibration on commercial calibration substrates, a critical factor for achieving reliable wafer-level measurements. This approach isolates calibration errors associated with standard location and probe contact repeatability, enabling more consistent cross-system data comparisons even with varying VNAs and probe models. The proposed method simplifies t he application of calibration uncertainty propagation tools for wafer-level experiments and highlights the value of location-dependent error estimation.
Furthermore, we illustrate how the estimated calibration reproducibility error budgets can be used for reporting the measurement results of a passive verification device.
1 MPI Corporation, Taiwan
2 Ferdinand-Braun-Institut gGmbH(FBH), Germany
Keywords:
On-wafer calibration, S-parameters, traceability, uncertainty budgets, broadband measurements.
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