A recently installed DRIE tool enables flexible through silicon substrate etching, needed to form, e.g., through silicon vias used to integrate InP-based devices with silicon and to fabricate micro gas cells.
from 30 countries work with us.
do we have in our portfolio - both German and international.
are we currently working on - state funded & industrial contracts.
have evolved from FBH - the majority of these are still active today.
2000 m² rooms and laboratories
for state-of-the-art research with high-performance process technology.