For certain applications it is useful to use a "remote plasma", which is produced separately. The chemistry and transient behavior of such plasmas can be controlled in a well-defined manner. Moreover, microwave induced plasmas (2.45 GHz), despite their high electron density, can be fairly cold even at room temperature. All these properties are considered, when we design our sources. The way that our plasma source is designed, it is suitable for a variety of gases such as fluorine or chlorine and not limited to air or argon.
Main challenges for plasma jet sources
- efficient energy transfer to the plasma (> 60%, instead of typical 10%)
- compact and robust tuning of the resonance frequency as well as impedance matching for operation with various gases
We investigate and develop microwave-driven ICP plasma sources within a DFG-project in cooperation with the Ruhr University Bochum. We bring together competencies within the field of 3D field simulations and circuit-component design of dedicated resonators and impedance matching circuits as well as from the area of measurement and characterization methods.