Characterization Techniques

For characterization of devices and circuits as well as for model verification, FBH relies on high-level measurement equipment and a dedicated group of measurement engineers and scientists.

DC Measurements

Fully automatic prober system for wafer-mapping of transfer and output characteristics as well as via resistance.

  • Keysight B2912A Precision SMU (Triax)
  • Keysight 5252A Matrix Switch (Triax)
  • Keysight B1500 parameter analyzator
  • MPI TS2000-SE automatic probestation with thermochuck

Measurement system for isothermal dynamic IV characteristics.  

  • Accent Dynamic IV analyzer (DIVA) D265
  • Alessi REL-4500 half-automatic wafer prober with Temptronic thermochuck

RF small signal measurements

2-port vector network analyzer measurements to 67 GHz for on-wafer S-parameter measurements of passive and active components. Developed for modelling and metrology measurements. This system was financed by the research the Research Fab Microelectronics Germany (FMD). 

  • Keysight PNA N5227B 10 - MHz 67 GHz Vector network analyzer
  • Keysight B2912A gate SMU
  • HP 4145B Semiconductor Parameter Analyzor
  • MPI TS2000-SE Automatic probestation with Thermochuck

2-port vector network analyzer measurements with millimeter-wave converters to 220 GHz for on-wafer S-parameter measurements of passive and active components. Developed for modelling and metrology measurements.  

  • Anritsu MS4647B 70 GHz Vektor network analyzer
  • Anritsu 3739C Broadband testset
  • Anritsu MA25400A mmWave Modules
  • HP 4155A Semiconductor Parameter Analyzor
  • Karl-Suss PA200 Semiautomatic probestation

Pulsed S-parameter measurement system to 40 GHz for isothermal measurements for modeling and investigation of trapping effects.

  • Auriga AU4850 pulsed DC/S Controller
  • Auriga XXYY output pulser, 200 ns minimum pulse width, 220 V und 2 A pulsed (40 W) 
  • pulsed Keysight PNAX N5245A (50 GHz) vector network analyzer
  • Cascade Summit 11000, manual probe station with Tempronic thermochuck

RF Large signal measurements

Mechanical load-pull system for very high power measurements of packed devices, for performance and model verification.

  • Maury Tuner-System MT981, 0.8 – 6.5 GHz, 250 W CW (2.5 kW PEP)
  • Scalar Load-Pull Messungen, Gepulste und CW
  • Agilent E4419B powermeter
  • Keithley 2400 SMU (Gate)
  • Agilent DC supply, 100 V, 15 A (drain)
  • transistor test-fixture from Intercontinental Microwave (ICM)
  • water cooling, optional temperature control 10 - 90 C°

On-wafer load-pull measurement setup with mechanical tuners for model verification measurements in mmWave range for active components.

  • Focus Tuner-System PMT 3280 APC3.5, 8 – 32 GHz, max 20 W
  • Focus Tuner-System PMT 5080, PC2.4, 8 – 50 GHz, max 10 W
  • scalar Load-Pull Messungen, Gepulste und CW
  • Agilent N1912A Lestungsmesser
  • vector load-pull, load-line measurements, PNAX N5245A with LSNA Option
  • (X-parameter measurements)
  • Cascade Summit 11000, manual probe station with Tempronic thermochuck

Wideband Modulated Measurements

System measurement setup for power amplifier measurements in a 50 Ohm environment or modulated measurements with digital pre-dirstortion (DPD). The system operates up to 6 GHz with more than 300 MHz modulation bandwidth. The system is operated by the RF Power Lab.

  • Keysight MXG Quelle (LO or Modulated)
  • IQ Modulator and Demodulator from Linear Technology (LT)
  • Tabor 2184 Arbitrary Waveform Generator (AWG), 4 analog channels and 32 digital channels, 14-bit, 2.3 GS/s
  • digitizer von SP Devices, AD14DC with totally 4 channels, 14-bit, 2.0 GS/s
  • water cooling, optional temperature control 10 - 90 C°
  • fully Matlab controlled

System measurement setup for on-wafer MMIC power amplifier measurements in a non-50 Ohm environment for modulated measurements with digital pre-dirstortion (DPD). The 16-Port system operates up to 67 GHz with more than 2 GHz modulation bandwidth. The system is operated by the RF Power Lab.