Enabling technologies for more compact InP devices and system integration An advanced InP HBT MMIC process yielded a stable node size of 300 nm with alignment quality of <20 nm. A system integration concept (using a low-temperature flip-chip process) has also been developed. FBH research: 17.01.2022
Patterning toolbox FIB-o-mat – exploiting the full potential of focused ion and electron beams for nanofabrication FBH provides an open-source Python toolbox for automating and optimizing direct writing with focused ion beams. The power of the toolbox has been demonstrated by, among others, the creation of phononic crystal resonators based on graphene. FBH research: 03.01.2022
