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Inter-Laboratory Comparison of On-Wafer Broadband 70kHz-220GHz Single-Sweep Measurements

A. Rumiantsev2, R. Doerner2, J. Martens3, S. Reyes3

Published in:

Proc. 51th European Microwave Conference (EuMC 2021), London, UK, Apr. 4-6, ISBN: 978-2-87487-063-7, pp. 425-428 (2022).

Abstract:

This paper discusses methods and results of the first known inter-laboratory on-wafer measurement comparison campaign for a 70 kHz-220 GHz single-sweep measurement system. Intra- and inter-laboratory repeatability metrics are evaluated from measurements of several passive DUTs corrected by mTRL calibrations. Two evaluation approaches are discussed: the NIST calibration comparison method and the estimate of the measurement confidence interval based on the measurement reproducibility. Presented results can support cross-laboratory data comparison when the evaluation and propagation of the measurement uncertainties through the measurement chain is more difficult to apply.

1 MPI Corporation, Taiwan
2 Ferdinand-Braun-Institut gGmbH (FBH), Leibniz-Institut für Höchstfrequenztechnik, Germany
3 Anritsu, Morgan Hill, CA, USA

Keywords:

on-wafer measurements, calibration, TRL, measurement uncertainties, calibration comparison.

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