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Effects Degrading Accuracy of CPW mTRL Calibration at W Band

G.N. Phung1, F.J. Schmückle1, R. Doerner1, W. Heinrich1, T. Probst2, U. Arz2

Published in:

IEEE MTT-S Int. Microw. Symp. Dig., Philadelphia, USA, Jun. 10-15, pp. 1296-1299 (2018).

Abstract:

On-wafer measurements of a Device Under Test (DUT) can yield accurate results only if the properties of the measurement environment are well defined and unwanted effects can be removed from the data. This is commonly achieved through a calibration process using a set of different calibration elements. However, various effects may degrade accuracy of this calibration, particularly at higher frequencies. This paper deals with the case of coplanar waveguide (CPW) lines and the multiline Thru Reflect Line (mTRL) method and discusses two of such issues, the influence of CPW ground width and of prober geometry.

1 Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik (FBH), 12489 Berlin, Germany
2 Physikalisch-Technische Bundesanstalt (PTB), Braunschweig, Germany

Index Terms:

Calibration, measurement accuracy, on-wafer measurement, probe.

Copyright Publisher version:
© 2018 IEEE - All rights reserved. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

Copyright Author version:
This is an author-created, un-copyedited version of the article G. N. Phung, F.J. Schmückle, R. Doerner, W. Heinrich, T. Probst, U. Arz, "Effects degrading accuracy of CPW mTRL calibration at W band," 2018 Int. Microwave Symp. Digest, Jun. 2018, pp. 1296-1299.
Copyright © 2018 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
The definitive publisher-authenticated version is available online at:
https://doi.org/10.1109/MWSYM.2018.8439837

Link to Publisher version
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