Characterization of Laser Structures by EBIC Measurements and Simulation
I. Rechenberg, H. Wenzel, A. Knauer, G. Beister
Published in:
Solid State Phenomena, vol. 63-64, pp. 69-76 (1998).
Abstract:
The electron beam induced current (EBIC) profiles of laser structures based on InGaAsP/InGaP/GaAs show a main peak and an additional shoulder or peak. To understand this phenomenom EBIC profiles at different bias were measured and compared to simulated curves. Using this approach a high sensitivity of the EBIC signal to the doping profile was found.
Ferdinand-Braun-Institut für Höchstfrequenztechnik, Rudower Chaussee 5, 12489, Berlin, Germany
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