CSMANTECH 2014
We present the following lectures at the International Conference on Compound Semiconductor Manufacturing Technology:
- Yield Improvement of Metal-Insulator-Metal Capacitors in MMIC Fabrication Process based on AlGaN/GaN HFETs
- Implementation of Slanted Sidewall Gates Technology in the Fabrication of S-,X-, and Ka-band AlGaN/GaN HEMTs
- Sputtered Iridium Gate Module for GaN HEMT with Stress Engineering and High Reliability
- In-situ Curvature Measurements applied to MOVPE-based Growth of Edge-Emitting Diode Lasers
Conference: 19.-22.05.2014 Denver (US)