Low-dispersion thin-film microstrip lines with cyclotene (benzocyclobutene) as dielectric medium
H.-M. Heiliger1, M. Nagel1, H.G. Roskos1, H. Kurz1, F. Schnieder2, W. Heinrich2, R. Hey3, K. Ploog3
Published in:
Appl. Phys. Lett., vol. 70, no. 17, pp. 2233–2235 (1997).
Abstract:
We report on thin-film microstrip lines (TFMSLs) fabricated on low-resistivity Si with polymerized cyclotene as the dielectric between signal and ground conductor, all on top of the wafer. Electro-optic high-frequency characterization of the TFMSLs reveals negligible modal dispersion up to the highest frequencies of 1.0 THz. In spite of the high substrate conductivity, the attenuation is low (≤1 dB/mm at 100 GHz). Over the full frequency range, it is dominated by conductor losses and not by absorption in the dielectric. With these dispersion and attenuation properties, TFMSLs are an attractive alternative to coplanar waveguides, with the additional advantage of immunity against substrate absorption and radiation losses.
1 Institut für Halbleitertechnik II, Rheinisch–Westfälische Technische Hochschule (RWTH) Aachen, D–52056 Aachen, Germany
2 Ferdinand–Braun–Institut für Höchstfrequenztechnik Berlin, D–12489 Berlin, Germany
3 Paul–Drude–Institut, D–10117 Berlin, Germany
© 1997 American Institute of Physics.
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