Integrated Thermal Silica Micro-Resonator Waveguide System With Ultra-Low Fluorescence
C. Pyrlik1, J. Schlegel1, F. Böhm2, A. Thies1, O. Krüger1, O. Benson2, A. Wicht1, and G. Tränkle1
Published in:
IEEE Photonics Technol. Lett., vol. 31, no. 6, pp. 479-482 (2019).
Abstract:
Thermally grown silica is one of the most desirable materials for the realization of optical waveguides and whispering-gallery mode micro-resonators due to the ultra-low propagation loss and broad transparency window from UV to mid-IR. Here, we present the design, fabrication, and characterization of a high-Q ring-resonator device with a monolithically integrated evanescent rib waveguide coupler made solely from silica thermally grown on a Si substrate. The device delivered an intrinsic Q-factor of 3.7×106 and operated close to the critical coupling regime for both TE and TM polarizations. The achieved Q-factors were more than three orders of magnitude higher than those of comparable silica resonator devices. Furthermore, we showcase the ultra-low parasitic fluorescence unique to thermally grown silica and compare it to a device fabricated in Si3N4.
1 Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik, 12489 Berlin, Germany
2 Institut für Physik, Humboldt-Universität zu Berlin, 12489 Berlin, Germany
Index Terms:
Integrated optics, optical resonators, whispering-gallery modes.
© Copyright 2019 IEEE - All rights reserved. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Full version in pdf-format.