LayTec's EpiNet 2017 software enables in-situ wafer bow measurement in multi-pocket satellite configuration

In-situ metrology system maker LayTec AG of Berlin, Germany says that the new release of its control and analysis software EpiNet 2017 provides a solution for the problem that, while in-situ reflectance and temperature on a multi-pocket satellite susceptor can be measured very accurately, in-situ curvature monitoring is trickier because it is rather challenging to find the wafer center.  Measurements have been carried out at FBH.
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