FBH uses LayTec's EpiTT Gen3 metrology tool for high-temperature MOCVD growth of AlN/sapphire templates for UV LEDs

In the course of its cooperation with in-situ metrology system maker LayTec AG of Berlin, Germany in the consortium 'Advanced UV for Life', the group of professor Markus Weyers at Berlin-based Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik (FBH) has developed a high-temperature (HT) metal-organic chemical vapor deposition (MOCVD) process for growing low-defect-density aluminium nitride (AlN)/sapphire templates for ultraviolet light-emitting diodes (UV LEDs).
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