CS Mantech

We present the following lectures at the International Conference on Compound Semiconductor Manufacturing Technology:

• Analysis and Optimization of a Through Substrate Via Etch Process for Silicon Carbide Substrates
• Comparison of Thermal Properties of Packaged AlGaN/GaN HFETs on Si and n-SiC Substrates
• Current Dispersion in Short Channel Al_0.32Ga_0.68N/GaN HEMTs

Conference:18.-21.05.2015, Arizona (US)