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apc|m conference

Conference: 16.-18.04.2024, Hamburg

At the 22nd European Advanced Process Control and Manufacturing (apc|m) Conference the FBH is represented with one contribution. This was developed in collaboration with LayTec AG. Anthony Martinez (LayTec AG) will present the joint results in his talk.

  • ICP-etching of GaN HFET structures: real time statistical process control of nm-thick GaN layers by means of End Point Detection