Roadmap for focused ion beam technologies
K. Höflich1, G. Hobler2, F.I. Allen3, T. Wirtz4, G. Rius5, L. McElwee-White6, A.V. Krasheninnikov7, M. Schmidt8, I. Utke9, N. Klingner7, M. Osenberg10, R. Córdoba11, F. Djurabekova12, I. Manke10, P. Moll13, M. Manoccio14, J.M. De Teresa15, L. Bischoff7, J. Michler9, O. De Castro4, A. Delobbe16, P. Dunne17, O.V. Dobrovolskiy18, N. Frese19, A. Gölzhäuser19, P. Mazarov20, D. Koelle21, W. Möller7, F. Pérez-Murano5, P. Philipp4, F. Vollnhals22, and G. Hlawacek7
Published in:
Appl. Phys. Rev., vol. 10, no. 4, pp. 041311, doi:10.1063/5.0162597 (2023).
Abstract:
The focused ion beam (FIB) is a powerful tool for fabrication, modification, and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for photomask repair in the semiconductor industry, there are now many different types of FIB that are commercially available. These instruments use a range of ion species and are applied broadly in materials science, physics, chemistry, biology, medicine, and even archaeology. The goal of this roadmap is to provide an overview of FIB instrumentation, theory, techniques, and applications. By viewing FIB developments through the lens of various research communities, we aim to identify future pathways for ion source and instrumentation development, as well as emerging applications and opportunities for improved understanding of the complex interplay of ion–solid interactions. We intend to provide a guide for all scientists in the field that identifies common research interest and will support future fruitful interactions connecting tool development, experiment, and theory. While a comprehensive overview of the field is sought, it is not possible to cover all research related to FIB technologies in detail. We give examples of specific projects within the broader context, referencing original works and previous review articles throughout.
1 Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik, 12489 Berlin, Germany
2 Institute of Solid-State Electronics, TU Wien, 1040 Vienna, Austria
3 Department of Materials Science and Engineering, University of California, Berkeley, California 94720, USA
4 Advanced Instrumentation for Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science and Technology (LIST), 4422 Belvaux, Luxembourg
5 Institute of Microelectronics of Barcelona, IMB-CNM-CSIC, 08193 Cerdanyola del Vallès, Spain
6 Department of Chemistry, University of Florida, Gainesville, Florida 32611-7200, USA
7 Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, 01328 Dresden, Germany
8 Department of Isotope Biogeochemistry, Helmholtz–Centre for Environmental Research GmbH—UFZ, 04318 Leipzig, Germany
9 Laboratory for Mechanics of Materials and Nanostructures, EMPA Swiss Federal Laboratories for Material Science and Technology, CH 3602 Thun, Switzerland
10 Institute of Applied Materials, Helmholtz-Zentrum Berlin für Materialien und Energie, 14109 Berlin, Germany
11 Institute of Molecular Science, University of Valencia, 46980 Paterna, Spain
12 Department of Physics, Helsinki Institute of Physics, University of Helsinki, 00014 Helsinki, Finland
13 Max Planck Institute for the Structure and Dynamics of Matter, 22607 Hamburg, Germany
14 CNR-NANOTEC Institute of Nanotechnology, 73100 Lecce, Italy
15 Instituto de Nanociencia y Materiales de Aragon (INMA), Universidad de Zaragoza-CSIC, 50009 Zaragoza, Spain
16 Orsay Physics S. A., 13710 Fuveau, France
17 Université de Strasbourg, CNRS, IPCMS UMR 7504, 67034 Strasbourg, France
18 Faculty of Physics, University of Vienna, 1090 Vienna, Austria
19 Faculty of Physics, Physics of Supramolecular Systems, University of Bielefeld, 33615 Bielefeld, Germany
20 Raith GmbH, 44263 Dortmund, Germany
21 Physikalisches Institut, Center for Quantum Science (CQ) and LISA+, Universität Tübingen, 72076 Tübingen, Germany
22 Institute for Nanotechnology and Correlative Microscopy gGmbH, 91301 Forchheim, Germany
Topics:
Plasmonics, Superconductivity, Focused ion beam, Photomasks, Scanning electron microscopy, Tomography, Interatomic potentials, Nanocrystals, Nanomaterials, Adsorption
© Author(s) 2023. All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
Full version in pdf-format.