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Interlaboratory Investigation of On-wafer S-parameter Measurements from 110 GHz to 1.1 THz

X. Shang1, N. Ridler1, U. Arz2, G.N. Phung2, I.  Roch-Jeune3, G. Ducournau3, K. Haddadi3, T. Flisgen4, R. Doerner4, D. Allal5, D. Jayasankar6, J. Stake6, R. Schmidt7, G. Fisher8, F. Mubarak9

Published in:

Proc. 53rd European Microwave Conference (EuMC 2023), Berlin, Germany, Sep. 19-21, ISBN: 978-2-87487-073-6, pp. 624-627 (2023).


This paper presents an interlaboratory comparison of on-wafer S-parameter measurements of coplanar waveguide (CPW) devices in the frequency range of 110 GHz to 1.1 THz. The comparison was conducted using bespoke calibration standards and verification devices fabricated from high resistivity Silicon. In this study, nine well-established measurement laboratories were involved, and the measurements were performed at different laboratories using different equipment but the same calibration method, i.e. multiline TRL (mTRL). The results show reasonable consistency across a wide frequency range. Observations on the results are provided, along with discussions of factors that may impact interlaboratory reproducibility at such high frequencies.

1 National Physical Laboratory (NPL), UK
2 Physikalisch-Technische Bundesanstalt (PTB), Germany
3 IEMN UMR 8520 CNRS, Université de Lille, France
4 Ferdinand-Braun-Institut gGmbH (FBH), Germany
5 Laboratoire National de métrologie et d’essais (LNE), France
6 Chalmers University of Technology, Sweden
7 Keysight, Belgium
8 FormFactor GmbH, Germany
9 National Metrology Institute of The Netherlands (VSL), The Netherlands


On-wafer measurement, coplanar waveguide (CPW), measurement comparison, S-parameters, millimetre-wave, terahertz.

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