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CS Mantech Conference

Conference: 15.-18.05.2023, Springs Orlando (US)

International Conference on Compound Semiconductor Manufacturing Technology - the FBH presents recent works:

  • Optimization of Iridium RF-Sputter Process for AlGaN/GaN based HEMT Gate Technology
  • Drift Region Epitaxy Development and  Characterization for High Blocking Strength and Low Specific On‑State Resistance in Vertical GaN‑Based Devices