Mode-locked diode laser-based two-photon polymerisation

N. Surkamp1, G. Zyla2, E.L. Gurevich2, A. Klehr3, A. Knigge3, A. Ostendorf2, M.R. Hofmann1

Published in:

Electron. Lett., vol. 56, no.2, pp. 91-93 (2020).

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In this Letter, the authors present the construction of three-dimensional microstructures by two-photon polymerisation induced by ultrashort pulses of a mode-locked diode laser. The ultrafast light source is based on a diode laser with segmented metallisation to realise a waveguide integrated saturable absorber. It is subsequently amplified and compressed resulting in ultrashort laser pulses of 440 fs length and average output power of 160 mW at a fundamental repetition rate of 383.1 MHz. These pulses are coupled into a customised two-photon polymerisation setup. A series of suspended lines were fabricated between support cuboids for testing the process behaviour. A 3D structure with complex features was polymerised to demonstrate the high potential for mode-locked diode lasers in the field of direct laser writing.

1 Faculty of Electrical Engineering and Information Technology, Photonics and Terahertz Technology, Ruhr University Bochum, Germany
2 Faculty of Mechanical Engineering, Applied Laser Technologies, Ruhr University Bochum, Germany
3 Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik, Berlin, Germany