RF Probe Technology: History and Selected Topics

A. Rumiantsev1, R. Doerner2

Published in:

IEEE Microwave Mag., vol. 14, no. 7, pp. 46-58 (2013).

© Copyright 2013 IEEE - All Rights Reserved. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.


Today, radio-frequency (RF) wafer probes play an important role in almost every step of the RF products lifecycle: from technology development, model parameter extraction, design verification, and debug to small-scale and final production test. By using RF probes, it became possible to measure true characteristics of the RF components at the wafer level. This halved research and development times and lowered the enormous costs of developing new products.

1 Brandenburg University of Technology, Siemens-Halske-Ring 14, D-03046 Cottbus, Germany
2 Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Straße 4, 12489 Berlin, Germany