Parasitic Effects and Measurement Uncertainties in Multi-Layer Thin-Film Structures

G.N. Phung, F.J. Schmückle, W. Heinrich

Published in:

Proc. 43th European Microwave Conf. (EuMC 2013), Nuremberg, Germany, Oct. 7-10, pp. 318-321 (2013).

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Abstract:

On-wafer measurements of multi-layer thin-film components in the mm-wave frequency range may involve uncertainties and parasitic effects due to adjacent structures on the wafer. Starting from a measured result, this paper investigates the parasitic effects causing the problem. It is found that it is the geometry of the probe head which plays an important role for the parasitic coupling.

Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Straße 4, 12489 Berlin, Germany

Keywords:

Measurements, Probes, Coupling, Parasitic Modes, em simulation.