Influence of quartz on silicon incorporation in HVPE grown AlN
J. Cryst. Growth, vol. 507, pp. 295-298 (2019).
Copyright © 2019 Elsevier B.V. All rights reserved. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the Elsevier B.V.
Aluminum nitride growth via hydride vapor phase epitaxy has been investigated with respect to impurity uptake. The precursor aluminum chloride was identified to react with quartz glass and provide silicon into the reactor atmosphere and subsequently into grown AlN layers. Reactor parts made of quartz were consecutively replaced by carbon glass parts to prevent unintentional silicon incorporation into III-nitride layers during growth. Carbon glass substitution of quartz parts led to a reduction of silicon levels in AlN by three orders of magnitude to 4*1016 cm-3, while carbon concentration in grown AlN layers remained low in the range of 1017 cm-3.
a Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Str. 4, 12489 Berlin, Germany
b Institut für Physik, Humboldt Universität zu Berlin, Newtonstr. 15, 12489 Berlin, Germany
A1. Substrate; A3. Hydride Vapor Phase Epitaxy; B1. Nitrides; B1. Sapphire; B2. Semiconducting III-V materials.