An Integrated Atmospheric Microwave Plasma Source

R. Kovacs1, N. Bibinov2, P. Awakowicz2, H.-E. Porteanu3, S. Kühn3, R. Gesche3

Published in:

Plasma Processes Polym., vol. 6, no. S1, pp. S233-S236 (2009).

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Atmospheric plasma processes become more and more popular in recent times. A new integrated atmospheric plasma source is presented which consists of a microwave resonator combined with a solid-state power oscillator. This allows for a very compact and efficient design of a microwave plasma source without external microwave power supply and matching units. Hydrophobic polymers have to be activated to ensure an effective painting or glueing. The performance of this new plasma source has been investigated with respect to surface activation depending on axial and radial distance to the substrate, process time, process gas, and flow velocity. Several polymeric materials have been compared. Polyethylene, polyamide, polystyrene, polypropylene, polycarbonate, and polytetrafluorineethylene show good activation results. This tool can be used especially for bulky goods and/or mass products, when a vacuum process is not possible or too expensive.

1 Aurion Anlagentechnik GmbH, Am Sandborn 14, Seligenstadt, Germany
2 Ruhr-Universität-Bochum, Allg. Elektro- und Plasmatechnik, Universitätsstraße 150, 44797 Bochum, Germany
3 Ferdinand-Braun-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Straße 4, 12489 Berlin, Germany