Ferdinand Braun Institute uses Pyro 400 for surface temperature uniformity of GaN

At the IC MOVPE XV in Lake Tahoe (23-28 May) many outstanding talks dealt with process optimization by means of optical in-situ metrology. One of them was presented by Mr. Veit Hoffmann of the Ferdinand Braun Institute Berlin (FBH).
mehr... (nur auf Englisch)

Compound Semiconductor, 29.06.2010