Nonlinear Transport in Microwave-Generated Plasma
H.-E. Porteanu1, I. Stefanović2, M. Klute3, P. Awakowicz2, R.P. Brinkmann3, and W. Heinrich1
Published in:
IEEE Trans. Plasma Sci., vol. 54, no. 4, pp. 1471-1473 (2026).
Abstract:
Excitation of a plasma with microwaves has the advantage that the lifetime of ions and electrons is much longer than the oscillation period. At a frequency of 2.45 GHz, the electron density is constant in time; therefore, one expects a constant conductivity. In spite of this, harmonics, i.e., nonlinear transport, can be detected at pressures < 50 Pa. We identified two possible mechanisms for this nonlinear behavior, depending on the type of excitation: ICP or capacitively coupled plasma (CCP).
1 Microwave Department, Ferdinand-Braun-Institut (FBH), 12489 Berlin, Germany
2 Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, 44801 Bochum, Germany
3 Theoretical Electrical Engineering, Ruhr University Bochum, 44801 Bochum, Germany
Index Terms:
capacitively coupled plasma (CCP), harmonics microwave plasma, ICP, nonlinearity
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