Gas Sensing of Nitrogen Oxide Utilizing Spectrally Pure Deep UV LEDs
F. Mehnke1, M. Guttmann1, J. Enslin1, C. Kuhn1, C. Reich1, J. Jordan1, S. Kapanke1, A. Knauer2, M. Lapeyrade2, U. Zeimer2, H. Krüger3, M. Rabe3, S. Einfeldt2, T. Wernicke1, H. Ewald3, M. Weyers2, and M. Kneissl2,4
Published in:
IEEE J. Sel. Top. Quantum Electron., vol. 23, no. 2, 2000108 (2017).
Abstract:
In this paper, we will present the development of a compact LED-based optical gas sensing system in the ultraviolet-C spectral region. This includes the design of the LED heterostruc- ture emitting near 226 nm, the development of an LED chip, and the implementation into a gas sensing system capable of detecting nitrogen oxide concentrations in the ppm range.
1 Institut für Festkörperphysik, Technische Universität Berlin, 10623 Berlin, Germany
2 Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik, 12489 Berlin, Germany
3 Institut für Allgemeine Elektrotechnik, Universität Rostock, 18059 Rostock, Germany
4 Institut für Festkörperphysik, Technische Universität Berlin, 10623 Berlin, Germany
Index Terms:
AlGaN-based, gas sensing, light emitting diode, nitrogen oxide, spectrally pure, ultraviolet.
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