Published in:

in "Fundamental Gas-Phase and Surface Chemistry of Vapor Deposition II/Process Control, Diagnostics and Modeling in Semiconductor Manufacturing IV", Konferenzbeitrag zur ECS 2001; edited by M.D. Allendorf, M.T. Swihart, M. Meyyappan, Electrochemical Society Proceedings, vol. 2001-13, pp. 292-300 (2001).