Combination of diode laser-based two-photon polymerization and masked stereolithography for microfluidic chip fabrication

F. Behlau^a, N. Surkamp^b, S.L. Schenk^a, S. Wohlfeil^c, A. Knigge^c, M.R. Hofmann^b, C. Esen^a, A. Ostendorf^a

Published in:

Proc. of SPIE, vol. 13884, Laser 3D Manufacturing XIII, Photonics West, San Francisco, USA, Jan 17-22, 1388406 (2026).

^a Applied Laser Technologies, Ruhr-Universität Bochum, Universitätsstr.150, 44801 Bochum, Germany
^b Photonics and Terahertz Technology, Ruhr-Universität Bochum, Universitätsstr.150, 44801 Bochum, Germany
^c Ferdinand-Braun-Institut (FBH), Gustav-Kirchhoff-Str. 4, 12489 Berlin, Germany

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