Scalable semipolar gallium nitride templates for high-speed LEDs
Metal organic vapor phase deposition on etched 4-inch-diameter sapphire wafers is used to create low-defect-density gallium nitride templates.
mehr... (in Englisch)
Metal organic vapor phase deposition on etched 4-inch-diameter sapphire wafers is used to create low-defect-density gallium nitride templates.
mehr... (in Englisch)