The scanning electron microscope as a flexible tool for investigating the properties of UV-emitting nitride semiconductor thin films
C. Trager-Cowan1, A. Alasmari1, W. Avis1, J. Bruckbauer1, P.R. Edwards1, B. Hourahine1,
S. Kraeusel1, G. Kusch1, R. Johnston1, G. Naresh-Kumar1, R.W. Martin1, M. Nouf-Allehiani1,
E. Pascal1, L. Spasevski1, D. Thomson1, S. Vespucci1, P.J. Parbrook2, M.D. Smith2, J. Enslin3,
F. Mehnke3, M. Kneissl3,4, C. Kuhn3, T. Wernicke3, S. Hagedorn4, A. Knauer4, V. Kueller4,
S. Walde4, M. Weyers4, P.-M. Coulon5, P.A. Shields5, Y. Zhang6, L. Jiu6, Y. Gong6,
R.M. Smith6, T. Wang6, and A. Winkelmann1,7
Published in:
Photonics Res., vol. 7, no. 11, pp. B73-B82, DOI: 10.1364/PRJ.7.000B73 (2019).
Abstract:
In this paper we describe the scanning electron microscopy techniques of electron backscatter diffraction, electron channeling contrast imaging, wavelength dispersive X-ray spectroscopy, and cathodoluminescence hyperspectral imaging. We present our recent results on the use of these non-destructive techniques to obtain information on the topography, crystal misorientation, defect distributions, composition, doping, and light emission from a range of UV-emitting nitride semiconductor structures. We aim to illustrate the developing capability of each of these techniques for understanding the properties of UV-emitting nitride semiconductors, and the benefits were appropriate, in combining the techniques.
1 Department of Physics, SUPA, University of Strathclyde, Glasgow G4 0NG, UK
2 Tyndall National Institute, University College Cork, Cork T12 R5CP, Ireland
3 Institute of Solid State Physics, Technische Universität Berlin, 10623 Berlin, Germany
4 Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik, 12489 Berlin, Germany
5 Department of Electronic and Electrical Engineering, Centre of Nanoscience & Nanotechnology, University of Bath, Bath BA2 7AY, UK
6 Department of Electronic and Electrical Engineering, University of Sheffield, Sheffield S1 3JD, UK
7 Laser Components Department, Laser Zentrum Hannover e.V., 30419 Hannover, Germany
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