Scalable semipolar gallium nitride templates for high-speed LEDs
B. Corbett1, L. Lymperakis2, F. Scholz3, C. Humphreys4, F. Brunner5, and T. Meyer6
Published in:
SPIE Newsroom, DOI: 10.1117/2.1201605.006482, 03 June (2016).
Abstract:
Metal organic vapor phase deposition on etched 4-inch-diameter sapphire wafers is used to create low-defect-density gallium nitride templates.
1 Tyndall National Institute, University College Cork, Cork, Ireland
2 Max Planck Institute for Iron Research, Düsseldorf, Germany
3 University of Ulm, Ulm, Germany
4 University of Cambridge Cambridge, United Kingdom
5 Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik, Berlin, Germany
6 OSRAM Opto Semiconductors, Regensburg, Germany
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