Impact of Parasitic Coupling on Multiline TRL Calibration
G.N. Phung1, F.J. Schmückle1, R. Doerner1, T. Fritzsch2, W. Heinrich1
Published in:
Proc. 47th European Microwave Conf. (EuMC 2017), Nuremberg, Germany, Oct. 10-12, pp. 835-838 (2017).
Abstract:
On-wafer measurements of any Device Under Test (DUT) usually require the application of a calibration algorithm to eliminate unwanted but unavoidable effects due to the probe tip properties, the probe pad, the neighboring structures on the wafer and instrumentation. The calibration is to remove their influence and to reveal the properties of the DUT itself. However, the calibration process is sensitive to parasitics of the probe environment and to the arrangement of the calibration lines on the wafer. This paper describes, for the case of thin-film microstrip lines, which deviations in the results must be expected and which basic rules should be followed to obtain a layout with minimum error using multiline Thru-Reflect-Line (TRL) calibration.
1 Ferdinand-Braun-Institut (FBH), Leibniz-Institut fuer Hoechstfrequenztechnik, 12489 Berlin, Germany
2 Fraunhofer Institut für Zuverlässigkeit und Mikrointegration (IZM), Berlin, Germany
Keywords:
Measurements, probes, coupling, parasitic modes, em simulation.
Copyright Publisher version:
© 2017 EuMA. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the EuMA.
Copyright Author version:
This is an author-created, un-copyedited version of the article G. N. Phung, F. J. Schmückle, R. Doerner, T. Fritzsch, and W. Heinrich, “Impact of Parasitic Coupling on Multiline TRL Calibration,” in Proc. of the 47th European Microwave Conference (EuMC), Nuremberg, Germany, Oct. 2017, pp. 835-838.
Copyright © 2017 EuMA. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the EuMA.
The definitive publisher-authenticated version is available online at:
dx.doi.org/10.23919/EuMC.2017.8230974
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