Establishing Traceability for On-Wafer S-Parameter Measurements of Membrane Technology Devices up to 110 GHz
U. Arz1, S. Zinal1, T. Probst1, G. Hechtfischer2, F.-J. Schmückle3, and W. Heinrich3
Published in:
90th ARFTG Microwave Measurement Symposium (ARFTG), Boulder, USA, Nov. 28 - Dec. 1 (2017).
Abstract:
In this paper we report on progress towards establishing traceability for fully calibrated on-wafer measurements of planar devices built in membrane technology. For the first time, we present a comprehensive uncertainty budget for on-wafer S-parameter measurements, including instrumentation errors, connector repeatability and calibration standard uncertainties. Preliminary results are shown for three typical devices.
1 Physikalisch-Technische Bundesanstalt (PTB), 38116 Braunschweig, Germany
2 Rohde & Schwarz GmbH & Co. KG, München, Germany
3 Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik, Berlin, Germany
Index Terms:
on-wafer, calibration, S-parameters, traceability, uncertainty budget.
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