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Calibration Substrate Design for Accurate mm-Wave Probe-Tip Calibration

A. Rumiantsev1, R. Doerner2, G.N. Phung2

Published in:

94th ARFTG Microwave Measurement Symposium (ARFTG), San Antonio, USA, Jan. 26-29 (2020).


This work presents the design concept, EM-simulation and measurement results of a new calibration substrate developed to address probe-tip calibration challenges and to improve calibration accuracy at mm-wave frequency range.

1 MPI Corporation, Taiwan
2 Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik (FBH), Germany

Index Terms:

on-wafer probes, coplanar waveguides (CPW), substrate modes, calibration.

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