RF Matching of a Reactive Ion Etching (RIE) Plasma Reactor
Published in:
Frequenz, vol. 59, no. 3-4, pp. 73-76 (2005).
Ferdinand-Braun-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Straße 4, D-12489 Berlin, Germany
© 2005 by Walter de Gruyter GmbH & Co.
Full version in pdf -format.