On the Ignition Voltage Behavior of Microwave Microplasmas
S. Kühn, C. Andrei, and R. Gesche
Published in:
European Microwave Conf. (EuMC 2007), Munich, Germany, Oct. 8-12, pp. 616-619 (2007).
Abstract:
Small-sized plasmas excited at microwave frequencies offer interesting applications from industrial processing to medicine. This paper presents first data on the ignition voltages of such microwave microplasmas. Using a quarter-wavelength resonant structure, an automated test system was set up, which allows to perform multiple ignition tests for each parameter constellation. Ignition voltage statistics are reported as well as the dependence on gas pressure for Ar, He and air in the range from 0.6 mbar to atmospheric pressure.
Ferdinand-Braun-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Straße 4, D-12489 Berlin, Germany
Copyright © EuMA 2007. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the EuMA 2007.
Full version in pdf-format.