MOVPE growth optimization for laser diodes with highly strained InGaAs MQWs
F. Bugge, U. Zeimer, R. Staske, B. Sumpf, G. Erbert and M. Weyers
Published in:
J. Cryst. Growth, vol. 298, pp. 652-657 (2007).
Abstract:
With the aim of realizing high power laser diodes on GaAs with narrow far fields and an emission wavelength above 1100 nm, we have studied the growth and strain behavior of pseudomorphic InxGa1-xAs (x>0.3) multi quantum wells grown by metalorganic vapor phase epitaxy. The effect of different numbers of quantum wells, barrier thickness, strain compensation and growth rate on defect formation has been studied.
Laser diodes with very small far field angles and different numbers of quantum wells were processed into broad area devices (100-200 µmx1-4 mm). Such devices show thermally limited output CW powers up to 20 W and no noticeable degradation over more than 10.000 h at 5 W.
Ferdinand-Braun-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Straße 4, D-12489 Berlin, Germany
Keywords:
A3. Metalorganic vapor phase epitaxy; A3. Quantum wells; B1. InGaAs; B3. Laser diodes
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