Enhancement of channel conductivity in AlGaN/GaN heterostructure field effect transistors by AlGaN:Si back barrier
E. Cho, F. Brunner, R. Zhytnytska, P. Kotara, J. Würfl, and M. Weyers
Published in:
Appl. Phys. Lett., vol. 99, no. 103505 (2011).
Abstract:
Heterostructure field effect transistors with three AlGaN/GaN interfaces were designed and investigated. A Si-doped AlGaN back barrier was used to compensate for the reduction of channel conductivity due to a carbon doped semi-insulating GaN buffer layer. Simulation using a one dimensional Poisson-Schrödinger solver showed an enhancement of the charge carrier density which was then confirmed experimentally. Hall and magnetic field dependent mobility measurements proved the Si-doped AlGaN back barrier layer causes neither degradation of electron mobility nor a parasitic conduction channel. Id,max of the transistors was enhanced by a factor of 1.5-2 without decreasing the off-state breakdown voltage.
Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Straße 4, D-12489 Berlin, Germany
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