3D Silicon Micromachined RF Resonators
K.M. Strohm1, F.J. Schmückle2 , O. Yaglioglu1, J.-F. Luy1, and W. Heinrich2
Published in:
IEEE MTT-S Int. Microwave Symp. Dig., 2003, pp. 1801-1804.
Abstract:
Passive components with high quality factor are required for many applications, e.g., filters. In the field of micromachining, this is commonly achieved by using multiple-wafer structures. An alternative technique is presented here together with design an measurement data, which is based on MEMS technology and yields single-wafer resonators thus reducing costs. Cavity resonators with the Si being partly removed show quality factors Q beyond 360.
1DaimlerChrysler Research Center, D-89081 Ulm, Germany
2Ferdinand-Braun-Institut für Höchstfrequenztechnik, Albert-Einstein-Straße 11, D-12489 Berlin, Germany
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