Characterization of Laser Structures by EBIC Measurements and Simulation

Published in:
Solid State Phenomena, vols. 63-64, pp. 69-76 (1998).
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Abstract:
The electron beam induced current (EBIC) profiles of laser structures based on InGaAsP/InGaP/GaAs show a main peak and an additional shoulder or peak. To understand this phenomenom EBIC profiles at different bias were measured and compared to simulated curves. Using this approach a high sensitivity of the EBIC signal to the doping profile was found.

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