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Calibration Standards Verification Procedure Using the Calibration Comparison Technique
A. Rumiantsev1,
R. Doerner2, S. Thies3
1 SUSS MicroTec Test Systems GmbH, Suss-Str. 1, Thiendorf OT Sacka, Germany
2 Ferdinand-Braun-Institut für Höchstfrequenztechnik, D-12489 Berlin, Germany
3 Rosenberger Hochfrequenztechnik GmbH & Co. KG, Hauptstrasse 1, Fridolfing D-83413, Germany
Published in:
36th European Microwave Conference Dig., 2006, pp. 489 - 491.
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Abstract:
This article examines the verification procedure
of coplanar calibration standards based on the calibration
comparison technique. For the first time, different commercially
available alumina calibration substrates were compared using
the NIST multiline TRL calibration procedure, calibration
comparison approach, and the NIST GaAs CPW calibration
reference material RM8130. The characteristic impedance of the
verified calibration line standards is extracted using the
multiline TRL procedure and the definition of the load standard
resistance. The error circuit, describing difference of the
substrate medium and the standard design is extracted. Finally,
the worst case error bounds for the measurement of passive
devices compared to the reference multiline TRL on the RM8130
are calculated for each tested substrate.
Index Terms:
calibration, error correction, calibration comparison, scattering parameters measurement.
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