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High power single mode 980 nm DBR tapered diode lasers with integrated sixth order surface gratings based on simplified fabrication process
K. Paschke, J. Behrendt, M. Maiwald, J. Fricke, H. Wenzel, and G. Erbert
Ferdinand-Braun-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Straße 4, D-12489 Berlin, Germany
Published in:
Proceedings SPIE, vol. 6184, "Semiconductor Lasers and Laser Dynamics II", p.1-7 (2006).
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Abstract:
We report on distributed Bragg reflector tapered lasers having 6th order surface gratings and
ridge waveguides simultaneously fabricated by wafer stepper lithography and reactive ion etching. Single
longitudinal mode emission at 978 nm and a beam propagation ratio of
M2 = 1.1 at 4.4 W have been obtained in quasi-continuous wave operation.
In CW operation, a maximal output power of 2.5 W with a side-mode suppression ratio of more than
20 dB and a beam propagation ratio of M2 < 1.4 for the central lobe has been
achieved.
Keywords:
high brightness, DBR laser, multisegment laser, tapered diode laser, high-power, diffraction limited radiation
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