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Novel Passivation Process for the Mirror Facets of Al-Free Active-Region High-Power Semiconductor Diode Lasers
P. Ressel, G. Erbert, U. Zeimer, K. Häusler, G. Beister, B. Sumpf, A. Klehr, G. Tränkle
Ferdinand-Braun-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Strasse 4, 12489 Berlin, Germany
Published in:
IEEE Photon. Techn. Lett. 17 (2005) 962-964.
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Abstract:
A novel process for the passivation of mirror facets
of Al-free active-region high-power semiconductor diode lasers
is presented. Designed for technological simplicity and minimum
damage generated within the facet region, it combines laser bar
cleaving in air with a two-step process consisting of 1) removal of
thermodynamically unstable species and 2) facet sealing with a
passivation layer. Impurity removal is achieved by irradiation with
beams of atomic hydrogen, while zinc selenide is used as the passivating
medium. The effectiveness of the process is demonstrated
by operation of 808-nm GaAsP-active ridge-waveguide diode
lasers at record optical powers of 500 mW for several thousand
hours limited only by bulk degradation.
Index Terms:
Atomic beams, life estimation, optical films, passivation, semiconductor lasers.
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