980-nm DBR lasers using higher order gratings fabricated in a single-step process

J. Fricke, H. Wenzel, M. Matalla, A. Klehr, and G. Erbert

Ferdinand-Braun-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Straße 4, D-12489 Berlin, Germany

Published in:
Conference Digest CLEO Europe / EQEC 2005, paper CB-111.
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Abstract:
Single-longitudinal mode emission from two-section RW DBR diode lasers having 6^th and 7^th order gratings will be reported. Grating and RW have been simultaneously defined and fabricated using wafer stepper lithography and reactive ion etching, respectively.

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